| 摘要 |
PROBLEM TO BE SOLVED: To provide a target holder capable of confirming the close contact with a target in advance. SOLUTION: The target holder 10 comprises: a target fitting face 11c to be fitted with a target 13; a recessed part 11a formed in such a manner that the opening thereof is clogged by the target 13 to be fitted; a cooling water feed hole 1 formed in the recessed part 11a so as to pass through the target holder 10; a cooling water exhaust hole 2 formed in the recessed part 11a so as to pass through the target holder 10; and an evacuation hole 3 formed in the recessed part 11a so as to pass through the target holder 10. COPYRIGHT: (C)2008,JPO&INPIT
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