An apparatus for forming a pattern in a curable material carried on a substrate (108) having one or more components with coefficients of thermal expansion that are substantially equal to the coefficient of thermal expansion of the substrate (108).
申请公布号
WO2007146031(A3)
申请公布日期
2008.05.22
申请号
WO2007US13374
申请日期
2007.06.06
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;WU, WEI;WANG, SHIH-YUAN;YU, ZHAONING;WILLIAMS, R. STANLEY,
发明人
WU, WEI;WANG, SHIH-YUAN;YU, ZHAONING;WILLIAMS, R. STANLEY,
