| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator in which the deformation quantity of a vibration plate due to driving of a piezoelectric element can be improved while maintaining driving durability of the vibration plate in a good condition, and to provide a manufacturing method thereof, a liquid jetting head and a liquid jetting device. <P>SOLUTION: The actuator has a plurality of piezoelectric elements 300 each having a lower electrode 60 provided on one surface side of a substrate 10, a piezoelectric layer 70 provided on the lower electrode 60 and an upper electrode 80 provided on the piezoelectric layer 70. The piezoelectric layer 70 of each of the piezoelectric elements 300 has a thickness relatively larger in its both end side than in its center portion, in a cross section in a short hand direction of the piezoelectric element 300. <P>COPYRIGHT: (C)2008,JPO&INPIT |
