| 摘要 |
<p>A processing system (1) is provided with a processing container (30) which stores a processing object (W) in a processing space (83); a processing fluid generating section (41) for generating a processing fluid at a prescribed temperature; and a main channel (56) arranged between the processing fluid generating section (41) and the processing container (30), for guiding the processing fluid supplied from the processing fluid generating section (41).In the downstream of the main channel (56), a processing fluid supply channel (171) is arranged for guiding the processing fluid into the processing container (30) through a switch valve (70) and supplying the processing fluid into the processing space (83) in the processing container (30). In the downstream of the main channel (56), a processing fluid bypass channel (172) is arranged for guiding the processing fluid, which is not guided to the processing fluid supply channel (171), to bypass the processing space (83) through the switch valve (70). On the main channel (56), a flow volume adjusting mechanism (65) for adjusting the flow volume of the processing fluid flowing in the main channel (56) is arranged.</p> |
