发明名称 Ultra-Fine Pitch Probe Card Structure
摘要 A system and a method of testing a semiconductor die is provided. An embodiment comprises a plurality of metal tips that are connected to a redistribution layer that fans out the pitch from the tips to metal plugs located in the substrate. The metal tips could be formed using semiconductor processes and either adding smaller layers of metal to larger layers of metal or else removing portions of one piece of metal to form the tips. The metal plugs are connected to a space transformation layer. The space transformation layer is electrically connected to a printed circuit board using, for example, a spring loaded connection such as a pogo pin. The space transformation layer is aligned onto the printed circuit board by a series of guidance mechanisms such as smooth fixtures, and the planarity of the tips is adjusted by adjusting a series of screws.
申请公布号 US2008116923(A1) 申请公布日期 2008.05.22
申请号 US20070768087 申请日期 2007.06.25
申请人 CHENG HSU MING;HWANG FRANK;CHAO CLINTON 发明人 CHENG HSU MING;HWANG FRANK;CHAO CLINTON
分类号 G01R31/26;G01R1/073 主分类号 G01R31/26
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