| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon reclamation apparatus easily reclaiming a large amount of silicon from a waste slurry. <P>SOLUTION: The silicon reclamation apparatus is equipped with a solid-liquid separation part where either a waste slurry discharged from a cutting device or a polishing device for which slurry containing abrasive grains and a coolant is used for cutting or polishing silicon or a waste slurry concentrate obtained by concentrating the waste slurry is subjected to solid-liquid separation to obtain solid substances for silicon recovery, a washing part where the solid substances for silicon recovery are washed with an organic solvent, and a classification part where the washed solid substances for silicon recovery are classified to obtain a silicon-containing powder in which the content of abrasive grains is reduced and the content of silicon is increased compared with before the classification. <P>COPYRIGHT: (C)2008,JPO&INPIT |
