| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing apparatus capable of realizing polishing of double side surfaces of a groove formed in a work with high accuracy in a short time. SOLUTION: This polishing apparatus includes: a pair of polishing members 80 for respectively polishing the double side surfaces 6 of the groove 4 formed in the work 2; a holder 62 to which both of the polishing members 80 are attached; a work driving part and an oscillation mechanism part which change a relative position of the groove 4 to the holder 62 in a longitudinal direction of the groove as a position change device; an expansion member 70 which is disposed between the respective polishing members 80 and is expanded by receiving air pressure to press the respective polishing members 80 to a side surface 6 of a polishing objected article; and a fluid pressure supply part which supplies air fluid pressure to the expansion member 70 as a supply device. COPYRIGHT: (C)2008,JPO&INPIT |
