METHOD FOR SUPPLYING TREATMENT GAS, TREATMENT GAS SUPPLY SYSTEM, AND SYSTEM FOR TREATING OBJECT

摘要

This invention provides a method for supplying a treatment gas, comprising the step of producing a treatment gas polymerizable depending upon the temperature and the step of supplying the produced treatment gas to a treating apparatus (4) for treating an object (W) with the produced treatment gas in a predetermined manner in a reduced pressure atmosphere. In supplying the treatment gas to the treating apparatus (4), the flow rate of the treatment gas is regulated with a mass flow rate control unit (34) of a low differential pressure type which comprises a diaphragm (80) and has a proper operation range of a supply pressure below the atmospheric pressure. The above constitution can regulate the supply amount (actual flow rate) of the treatment gas polymerizable depending upon the temperature, for example, HF gas in an accurate and stable manner.