| 摘要 |
An object of the present invention is to avoid short circuits between excitation electrodes by suppressing staying of metal films on a crotch portion by means of reducing storage of resist on the crotch portion of a tuning fork when forming excitation electrodes on respective arms of the tuning fork by etching the metal film on the surface of a quartz resonator along a resist pattern formed on the surface thereof. To achieve the object, the shape of the crotch portion of the tuning fork of a quartz piece is controlled such that main surfaces of two sheets of original plates, which are made of quartz crystal and the main surfaces thereof are orthogonal to the direction of the Z axis, which is a crystal axis, are bonded so that the plus/minus directions of the X axis, which is another crystal axis, are made in a reverse relation to each other to form a quartz substrate, and masks for forming the outer shape, through which the surfaces of the quartz substrate are exposed, are formed on both front and back surfaces of the quartz substrate in a manner that the mask follows along the outer shape of the quartz piece and the width direction of the outer shape agrees with the X axis, and the quartz substrate is etched to form the outer shape of the quartz piece.
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