发明名称 Article transfer system
摘要 A system for controlling an axial movement of an article is presented. The system comprises a support stage assembly and a spring suspension arrangement mounted on the support stage assembly. The spring suspension arrangement comprises first and second assemblies arranged in a coaxial relationship one inside the other. The first assembly is attached to the support stage assembly. The second assembly serves for supporting an article-carrying member and is driven for movement along the axis with respect to the first assembly. The outer one of the first and second assemblies is configured to define two spaced-apart parallel planes perpendicular to said axis. The first and second assemblies are attached to each other by first and second membrane-like members arranged in a spaced-apart parallel relationship along said axis.
申请公布号 US2008115614(A1) 申请公布日期 2008.05.22
申请号 US20080010040 申请日期 2008.01.18
申请人 DVIR ERAN;SHULMAN BENIAMIN 发明人 DVIR ERAN;SHULMAN BENIAMIN
分类号 G05G11/00;B23Q1/58;G03F7/20;H01L21/68;H01L21/687 主分类号 G05G11/00
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