发明名称 SERVER EQUIPMENT, INFORMATION PROCESSING METHOD, AND PROGRAM
摘要 <p><P>PROBLEM TO BE SOLVED: To raise caution about a change in the content of a recipe when the content of the recipe is changed. <P>SOLUTION: The server equipment 20 comprises a recipe storing portion 24 for storing at least a recipe used in manufacturing equipment, a recipe receiving portion 23 for receiving a changed recipe when the content of the recipe of the manufacturing equipment is changed, a recipe accumulating portion 25 for accumulating recipes received by the recipe receiving portion 23 in the recipe storing portion 24, a change information constructing portion 27 for constructing change information which is information about the change of the content of the recipe, a destination information storing portion 28 for storing destination information indicating the information about the destination to which the change information is to be transmitted, a destination information acquiring portion 29 for acquiring the destination information from the destination information storing portion 28, and a change information transmitting portion 30 for transmitting the change information constructed by the change information constructing portion 27 to the destination indicated by the destination information acquired by the destination information acquiring portion 29. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008117974(A) 申请公布日期 2008.05.22
申请号 JP20060300702 申请日期 2006.11.06
申请人 TOKYO ELECTRON LTD 发明人 NIWA TOMOKO
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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