| 摘要 |
PROBLEM TO BE SOLVED: To provide a Schottky electron gun having less generation of a flare component. SOLUTION: The Schottky electron gun comprises a tungsten monocrystal electron source which is coated with zirconium oxide and of which tip is sharply etched, a filament to heat the tungsten monocrystal electron source, a suppressor electrode to suppress thermoelectrons generated from the filament, a drawing electrode which gives an electric field for emitting electron beams from the tungsten monocrystal electron source, and an accelerating electrode which accelerates the electron beams drawn from the drawing electrode to a prescribed accelerating voltage. The drawing electrode has a plurality of stops to restrict angles of electron beams to pass. COPYRIGHT: (C)2008,JPO&INPIT
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