INITIAL PHASE DETECTION METHOD FOR PERMANENT-MAGNET SYNCHRONOUS MACHINE, CONTROL METHOD FOR PERMANENT-MAGNET SYNCHRONOUS MACHINE, MOVING DEVICE, MANUFACTURING DEVICE FOR ELECTRONIC COMPONENT, INSPECTION DEVICE FOR ELECTRONIC COMPONENT, MANUFACTURING DEVICE FOR PRECISION COMPONENT, AND INSPECTION DEVICE FOR PRECISION COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide an initial phase detection method for a permanent-magnet synchronous machine having little detection error and a shorter detection time, and a control method for the permanent-magnet synchronous machine, a moving device, a manufacturing device for an electronic component, an inspection device for an electronic component, a manufacturing device for a precision component and an inspection device for a precision component.

SOLUTION: The initial phase detection method for the permanent-magnet synchronous machine supplies AC to a coil to vibrate a movable element to measure the position of the vibrated width end of the vibration, thereby detecting the initial phase based on the measured value of the position and the vibration characteristics of the vibration.

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