| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck that can eliminate color irregularities in sintered aluminum nitride and in which changes in volume resistivity caused by addition of titanium nitride do not easily occur. <P>SOLUTION: An electrostatic chuck includes an electrode 2 and a dielectric layer 3 provided on the electrode 2. The dielectric layer 3 attracts a material to be attracted as a result of a voltage being applied to the electrode 2. A sintered aluminum nitride that includes 0.3 to 3% by mass of samarium by oxide conversion and 6 to 10% by mass of one type among titanium carbide, oxide, or nitride is used. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
