| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous coating device capable of preventing the increase of the contact resistance I on the surface of a porous body caused by reverse sputtering between the porous body and a tool for fixing the porous body, and to provide a method for producing a coated porous body. SOLUTION: After a coating film 8a composed of a low resistance conductive substance is formed on the planar face 2a of the porous body 2 by using a coating device 1, which is provided with: a target 3 composed of a low resistance conductive substance; the tool 4 for fixing the porous body 2; an interposition body 5 composed of a low resistance conductive substance and interposed between the fixture 4 and the porous body 2; and a voltage applying apparatus 6 for applying prescribed bias voltage to the tool 4, the coating film 8b composed of the low resistance conductive substance is formed on the planar face 2b of the porous body 2. COPYRIGHT: (C)2008,JPO&INPIT
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