| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jet head which enables high-precision and high-quality printing to be carried out by uniforming liquid jet characteristics, and the yield to be improved. SOLUTION: The manufacturing method has the process of forming piezoelectric elements 300 comprised of a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80 to one face side of a channel formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings 21 that jet the liquid are installed, and the process of forming the pressure generation chambers 12 to the channel formation substrate 10 with the piezoelectric elements 300 overlying it. In the process of forming the pressure generation chambers 12, a capacitance of the piezoelectric layer 70 for every piezoelectric element 300 or for at least every one selected from piezoelectric element groups each composed of a plurality of piezoelectric elements 300 is measured. The pressure generation chambers 12 are formed with their widths w<SB>1</SB>and w<SB>2</SB>changed for every piezoelectric element 300 or for every piezoelectric element group on the basis of the measured capacitance. COPYRIGHT: (C)2008,JPO&INPIT
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