发明名称 THIN FILM FOR USE AS REFLECTIVE FILM OR SEMI-TRANSMISSIVE REFLECTIVE FILM, SPUTTERING TARGET AND OPTICAL RECORDING MEDIUM
摘要 <p>A thin film for use as reflective film or semi-transmissive reflective film, comprising a matrix of silver or silver alloy and, dispersed therein, a phase of at least one compound selected from among gallium, palladium and copper nitrides, oxides, composite oxides, nitroxides, carbides, sulfides, chlorides, silicides, fluorides, borides, hydrides, phosphides, selenides and tellurides. The compound phase of the thin film may contain, as well as the above compounds, at least one compound selected from among silver nitride, oxide, composite oxide, nitroxide, carbide, sulfide, chloride, silicide, fluoride, boride, hydride, phosphide, selenide and telluride. This thin film reduces drop of reflectance in the long-term use, thus attaining prolongation of the life span of optical recording medium, display and other various apparatuses using the reflective film. This thin film is also useful as a semi-reflective/semi-transmissive film for use in optical recording medium.</p>
申请公布号 WO2008059580(A1) 申请公布日期 2008.05.22
申请号 WO2006JP322931 申请日期 2006.11.17
申请人 TANAKA KIKINZOKU KOGYO K.K.;OBATA, TOMOKAZU;YANAGIHARA, HIROSHI 发明人 OBATA, TOMOKAZU;YANAGIHARA, HIROSHI
分类号 G02B5/08;C23C14/34;G02B5/10;G11B7/24;G11B7/24038;G11B7/258;G11B7/259;G11B7/26 主分类号 G02B5/08
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