METHODS AND ARRANGEMENT FOR CREATING A HIGHLY EFFICIENT DOWNSTREAM MICROWAVE PLASMA SYSTEM
摘要
A plasma generation arrangement configured to provide plasma downstream to a plasma processing chamber. The arrangement includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The arrangement also includes a plasma tube assembly intersecting the microwave waveguide assembly. The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis. The plasma tube assembly also has a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps.
申请公布号
WO2007102924(B1)
申请公布日期
2008.05.22
申请号
WO2006US62446
申请日期
2006.12.20
申请人
LAM RESEARCH CORPORATION;KAMAREHI, MOHAMMAD;WANG, ING-YANN ALBERT