| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a field emission element capable of extending life of the element with degradation of carbon nanotube prevented. <P>SOLUTION: The method includes a step of sequentially forming a cathode electrode 112, an insulation layer 114 and a gate substance layer on a substrate 110, a step of forming a metal sacrifice layer on an upper face of the gate substance layer, a step of forming a through-hole to expose the insulation layer 114 to the metal sacrifice layer and the gate substance layer, a step of forming an emitter hole 130 to expose the cathode electrode to the insulation layer 114 exposed through the through-hole, a step of forming a gate electrode 115 by etching the gate substance layer which makes up an upper-part wall of the emitter hole 130, and a step of forming an emitter 150 made of carbon nanotube (CNT) on an upper surface of the cathode electrode 112 placed at a lower part of the thorough-hole. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
