发明名称 SUBSTRATE STRUCTURE HAVING THIN-FILM PATTERN LAYER AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a substrate structure having a thin-film pattern layer, and its manufacturing method. <P>SOLUTION: The substrate structure having the thin-film pattern layer comprises: a substrate; and a plurality of partitions formed on the substrate, wherein a plurality of receiving spaces are formed in rows and columns by the partitions and the substrate structure further includes a plurality of thin-film pattern layers formed in the plurality of the receiving spaces in a manner such that the thin-film pattern layers made of the same material in each row have an irregular thickness distribution. Further, the manufacturing method of the substrate structure having the thin-film pattern layer is also provided. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008116929(A) 申请公布日期 2008.05.22
申请号 JP20070264847 申请日期 2007.10.10
申请人 ICF TECHNOLOGY LTD 发明人 CHOU CHING-YU;CHEN WEN-TSING
分类号 G02B5/20;B05D1/26 主分类号 G02B5/20
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