| 摘要 |
PROBLEM TO BE SOLVED: To continuously monitor a chemical contaminant or the like in air within a clean room or the like. SOLUTION: N standard gas vectors are preliminarily formed in the m-dimensional space, which is formed by the detection outputs due to m sensor elements, on the basis of the results measured by n-species of standard gases and the m sensor elements (S1 and S2). The measuring results of a sample gas collected at every predetermined measuring time interval are positioned in the m-dimensional space and the similarity index values with respect to the respective standard gases are calculated from the relation of the measuring points thereof with the standard gas vectors and the concentration corresponding to the standard gas having similarity is calculated (S3-S6). This similarity index value and the concentration value are directly displayed (S7) to provide the data intuitively understood by a user. COPYRIGHT: (C)2008,JPO&INPIT
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