| 摘要 |
A micro resonator sensor using surface plasmon resonance of a total reflection mirror is provided to be integrated as an on-chip, and to have ultra small shape and high sensitivity. A micro resonator sensor using surface plasmon resonance of a total reflection mirror comprises a first input waveguide(510), a first output waveguide(540), a first total reflection mirror(520) and a first metal film(530). A first inspection light is input to the first input waveguide. The first output waveguide is disposed so as to have predetermined angle relative to the first input waveguide, and emits the first inspection light. The first total reflection mirror is disposed between the first input and output waveguides, and totally reflects the first inspection light input to a first surface through the first input waveguide to the first output waveguide. The first metal film is located in a second surface of the first total reflection mirror, and forms surface plasma wave by the first inspection light input to the first total reflection mirror.
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