| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film device in which membrane part damage can be suppressed, a distance between the membrane part and through electrodes can be shortened and airtightness is easily ensured, and to provide its manufacturing method. <P>SOLUTION: The piezoelectric thin film device and its manufacturing method comprise: a step for forming through electrodes (30) in a substrate (10), and a step for forming a membrane part (20) on the surface of the substrate (10), which is connected to the through electrodes 30, wherein a lower electrode (22) faces an upper electrode (26) across a piezoelectric film (24) after the step for forming the through electrodes (30). <P>COPYRIGHT: (C)2008,JPO&INPIT |
