| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system and a processing method capable of improving safety and productivity, in automatically determining that a processing liquid reservoir tank is empty when a liquid is actually runs out in the processing liquid reservoir tank and the processing liquid is not supplied to a line for draining the processing liquid from the processing liquid reservoir tank, thereby supplying the processing liquid drained from the processing liquid reservoir tank to a workpiece. SOLUTION: A reciprocating pump 30 is interposed on a line 22 (23) for draining the processing liquid from the processing liquid reservoir tank 20. When the reciprocating pump 30 drains the processing liquid from the processing liquid reservoir tank 20, a moving time at a predetermined distance when a reciprocating member 34 of the reciprocating pump 30 moves reciprocally is measured. If the moving time is smaller than a previously set time, it is determined that the processing liquid reservoir tank 20 is empty. COPYRIGHT: (C)2008,JPO&INPIT
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