| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device permitting to supply ultraviolet laser light excellent in processability to a processing part away from a laser oscillator with a flat energy distribution, through an optical fiber superior in flexibility, by suppressing damages and optical losses of the optical fiber, without having to lower the ultraviolet laser light energy or the optical coupling efficiency of the optical fiber. SOLUTION: The ultraviolet laser light 2 can be made incident on the optical fiber 5 without damaging the optical fiber 5, by preparing a light scattering structure body 4 on an optical path between the ultraviolet laser oscillator device 1 and the optical fiber 5 for a light guide, and by scattering or uniformalizing an energy distribution of the ultraviolet laser light 2. COPYRIGHT: (C)2008,JPO&INPIT
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