| 摘要 |
A hardmask composition includes a solvent and an organosilicon copolymer. The organosilicon copolymer may be represented by Formula A: <?in-line-formulae description="In-line Formulae" end="lead"?>(SiO<SUB>1.5</SUB>-Y-SiO<SUB>1.5</SUB>)<SUB>x</SUB>(R<SUP>3</SUP>SiO<SUB>1.5</SUB>)<SUB>y</SUB> (A)<?in-line-formulae description="In-line Formulae" end="tail"?> wherein x and y may satisfy the following relations: x is about 0.05 to about 0.9, y is about 0.05 to about 0.9, and x+y=1, R<SUP>3 </SUP>may be a C<SUB>1</SUB>-C<SUB>12 </SUB>alkyl group, and Y may be a linking group including a substituted or unsubstituted, linear or branched C<SUB>1</SUB>-C<SUB>20 </SUB>alkyl group, a C<SUB>1</SUB>-C<SUB>20 </SUB>group containing a chain that includes an aromatic ring, a heterocyclic ring, a urea group or an isocyanurate group, or a C<SUB>2</SUB>-C<SUB>20 </SUB>group containing one or more multiple bonds.
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