| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate-inspection device capable of attaining precise visual inspection for a substrate to be inspected. SOLUTION: The whole of a device body 4, having a substrate holder 10 for holding the substrate to be inspected, is made to be movable along a guide 1a of a base table 1, the device body 4 is made to be rotatable around a Z-axis as the center via a rotary part 6, and further, the substrate holder 10 itself is also to be rotatable around an X-axis orthogonal to the Z-axis as the center via a shaft part 12 having a friction mechanism. COPYRIGHT: (C)2008,JPO&INPIT
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