| 摘要 |
Provided is an electrohydrodynamic (EHD) micro-pump and a method of operating the same. The EHD micro-pump includes a plurality of electrodes alternately disposed on a substrate, an insulating layer covering the electrodes on the substrate, a carbon nanotube (CNT) layer formed on the insulating layer, a cover that forms a chamber with the substrate to accommodate the plurality of electrodes on the substrate where the cover includes a fluid inlet and a fluid outlet, an upper electrode formed on an inner surface of the cover facing the plurality of electrodes, and a power supplier that applies a voltage to the plurality of electrodes.
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