SPUTTERING TARGET AND METHOD FOR PREPARATION THEREOF,申请号EP20040722457-传众专利搜索

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发明名称	SPUTTERING TARGET AND METHOD FOR PREPARATION THEREOF
摘要
申请公布号	EP1612292(B1)	申请公布日期	2008.05.21
申请号	EP20040722457	申请日期	2004.03.22
申请人	KOBELCO RESEARCH INSTITUTE, INC.	发明人	MATSUMURA, HIROMI;YONEDA, YOICHIRO
分类号	C23C14/34;B23K20/12;B23K20/22	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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