发明名称 POWER SUPPLY SYSTEM, POWER SUPPLY METHOD AND LOT PROCESS METHOD
摘要 <p>A power supply system is disclosed. The system includes a power supply unit which supplies power to a processing unit, an arrival time calculating portion which calculates arrival time taken for a lot to arrive at the processing unit from a present position based on the state of the lot, a comparing portion which compares the arrival time with start-up time of the processing unit, and a supply control portion which controls the power supply unit. The supply control portion causes operation power to be supplied to the processing unit when the arrival time is equal to or shorter than the start-up time and causes saving power which is smaller than the operation power to be supplied to the processing unit when the arrival time is longer than the start-up time.</p>
申请公布号 KR100831473(B1) 申请公布日期 2008.05.21
申请号 KR20060081210 申请日期 2006.08.25
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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