| 摘要 |
Semiconductor manufacturing equipment and a method for teaching a wafer transfer robot thereof are provided to automatically set teaching of the wafer transfer robot for each of processing modules irrespective of a gap between the wafer transfer robot and processing module by mathematical calculation. Semiconductor manufacturing equipment(100) comprises a plurality of process modules(102:102a-102j), a wafer transfer robot(110), and a control unit(150). The process modules are configured to handle the process. The wafer transfer robot transfers a wafer to the process modules. The control unit is configured to set teaching of the wafer transfer robot for each of the process module irrespective of a gap between the wafer transfer robot and process module, by setting teaching of the wafer transfer robot with respect to a reference module selected out of the process modules, detecting displacement of the wafer transfer robot by the setting for the reference module, and computing position data of the wafer transfer robot according to setting for each of the rest of the process modules by using positional relationship between the detected displacement and the reference module.
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