REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT,申请号EP20060776955-传众专利搜索

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发明名称	REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT
摘要
申请公布号	EP1922586(A2)	申请公布日期	2008.05.21
申请号	EP20060776955	申请日期	2006.08.18
申请人	CARL ZEISS SMT AG	发明人	GELLRICH, BERNHARD;WEBER, ULRICH
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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