| 摘要 |
<p>PROBLEM TO BE SOLVED: To uniform the space between the respective substrates, and to reduce the deflection of the substrate due to its own weight by inclining a conveying case so that the substrate juxtaposing direction in the locking wall parts makes an angle within a specific range with regard to the horizontal surface. SOLUTION: The attitude of a conveying case 11 is controlled so that the substrate juxtaposing direction in the locking wall parts 12 is made to make an angleθwith regard to the horizontal surface. The substrates S inside a conveying case 12 controlled in such an attitude are inclined in the same direction inside the grooves 12b corresponding to the inclined direction of the conveying case 11. Thereby, the respective substrates S are brought into a parallel condition to make a constant pitch P (the same as the pitch P formed in the groove parts 12b), and also the deflection of the substrate S due to its own weight is extremely reduced. The angleθis set within the range of 5 to 20 deg.. If the angleθis less than 5 deg., the inclination in the same direction inside the conveying case 11 becomes uneven, while if the angleθexceeds 20 deg., the deflection due to its own weight is caused in the substrate S that has been locked in the groove parts 12b, and the hindrance is caused in the taking-out of the substrate S.</p> |
