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发明名称
Verbesserte integrierte Mehrschicht-Testflächen und Methode dafür
摘要
申请公布号
DE69838362(T2)
申请公布日期
2008.05.21
申请号
DE1998638362T
申请日期
1998.05.21
申请人
INTERNATIONAL BUSINESS MACHINES CORP.;QIMONDA AG
发明人
ALSWEDE, FRANK;MENDELSON, RON;DAVIES, WILLIAM;PREIN, FRANK;HOYER, RONALD
分类号
H01L21/66;H01L23/485;H01L23/58
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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