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发明名称
Compound semiconductor surface stabilizing method
摘要
申请公布号
EP1058359(B1)
申请公布日期
2008.05.21
申请号
EP20000111586
申请日期
2000.05.30
申请人
SHARP KABUSHIKI KAISHA
发明人
WATANABE, MASANORI
分类号
H01L21/314;H01S5/028
主分类号
H01L21/314
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代理人
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