METHOD AND DEVICE TO QUANTIFY ACTIVE CHARGE CARRIER PROFILES IN ULTRA-SHALLOW SEMICONDUCTOR STRUCTURES,申请号EP20060791888-传众专利搜索

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发明名称	METHOD AND DEVICE TO QUANTIFY ACTIVE CHARGE CARRIER PROFILES IN ULTRA-SHALLOW SEMICONDUCTOR STRUCTURES
摘要
申请公布号	EP1922539(A1)	申请公布日期	2008.05.21
申请号	EP20060791888	申请日期	2006.09.07
申请人	INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW (IMEC);KATHOLIEKE UNIVERSITEIT LEUVEN, K.U. LEUVEN R&D	发明人	CLARYSSE, TRUDO;BOGDANOWICZ, JANUSZ
分类号	G01N21/17;G01R31/26	主分类号	G01N21/17
代理机构		代理人
主权项
地址

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