发明名称 |
VERFAHREN ZUR HERSTELLUNG EINES EINKRISTALLSILIZIUMKARBIDS |
摘要 |
For growth of a silicon carbide single crystal by transport of a silicon carbide-forming gas over a silicon carbide seed crystal plate (11), the seed crystal used is machined by electrolytic in-process dressing grinding. By using a seed crystal with low machining damage and low machining deformation, it is possible to grow a silicon carbide single crystal with minimal defects such as micropipes, and thus reduce the cost of manufacture of semiconductor devices. <IMAGE> |
申请公布号 |
DE69938510(D1) |
申请公布日期 |
2008.05.21 |
申请号 |
DE1999638510 |
申请日期 |
1999.12.24 |
申请人 |
SHOWA DENKO K.K. |
发明人 |
SHIGETO, MASASHI;YANO, KOTARO;NAGATO, NOBUYUKI |
分类号 |
C30B29/36;B24B53/00;C30B23/00;C30B23/02;C30B25/00;C30B25/02;C30B25/20 |
主分类号 |
C30B29/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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