发明名称 Method of fabricating field effect transistor (FET) having wire channels
摘要 In a field effect transistor (FET), and a method of fabricating the same, the FET includes a semiconductor substrate, source and drain regions formed on the semiconductor substrate, a plurality of wire channels electrically connecting the source and drain regions, the plurality of wire channels being arranged in two columns and at least two rows, and a gate dielectric layer surrounding each of the plurality of wire channels and a gate electrode surrounding the gate dielectric layer and each of the plurality of wire channels.
申请公布号 US7374986(B2) 申请公布日期 2008.05.20
申请号 US20070902403 申请日期 2007.09.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM SUNGMIN;LI MING;YOON EUNGJUNG
分类号 H01L21/337 主分类号 H01L21/337
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