SIOX: SI COMPOSITE MATERIAL COMPOSITIONS AND METHODS OF MAKING SAME

摘要

Silicon oxide and electrically conductive doped silicon materials are sintered in a protective environment to yield a composite SiOx:Si material that exhibits the properties of SiOx, and yet is electrically conductive due to the presence of Si. Such a composite material finds many uses, such as a target for DC and/or AC sputtering processes to produce silicon oxide thin films for touch-screen applications, barrier thin films in LCD displays and optical thin films used in a wide variety of applications.