发明名称 Local multilayered metallization
摘要 An interconnect comprises a trench and a number of metal layers above the trench. The trench has a depth and a width. The depth is greater than a critical depth, and the number of metal layers is a function of the width. In an alternate embodiment, a metallization structure having a trench including a metal layer and a second trench including a plurality of metal layers coupled to the metal layer is disclosed. The metal layer is highly conductive, and at least one of the plurality of metal layers is a metal layer that is capable of being reliably wire-bonded to a gold wire. The trench is narrower than the second trench, and at least one of the plurality of metal layers is copper or a copper alloy.
申请公布号 US7375026(B2) 申请公布日期 2008.05.20
申请号 US20040931357 申请日期 2004.08.31
申请人 MICRON TECHNOLOGY, INC. 发明人 RHODES HOWARD E.
分类号 H01L21/4763;H01L21/768;H01L23/485;H01L23/528;H01L23/532 主分类号 H01L21/4763
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