发明名称 Semiconductor device having an SOI structure and method for manufacturing the same
摘要 There is provided a semiconductor device in which the characteristic variations of a transistor and the degradation of a gate oxide layer are reduced during a WP process and a method for manufacturing the same. The semiconductor device includes a semiconductor chip having an SOI transistor. The SOI transistor includes a semiconductor layer comprising device isolating regions, a channel region, and diffusion regions that sandwich the channel region therebetween. The semiconductor layer is formed on a support substrate via a first insulating layer. A gate electrode is formed on the channel region of the semiconductor layer via a second insulating layer. The semiconductor chip has, on the first surface, a first electrode pad electrically connected to the SOI transistor and a second electrode pad electrically connected to the support substrate.
申请公布号 US7375397(B2) 申请公布日期 2008.05.20
申请号 US20060416076 申请日期 2006.05.03
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 SHIZUNO YOSHINORI
分类号 H01L27/01;H01L23/48;H01L23/52;H01L27/12;H01L29/40;H01L31/0392 主分类号 H01L27/01
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