| 摘要 |
A proximity member moves in a moving direction (-X) in a condition that an opposed surface of the proximity member is disposed in the vicinity of a substrate surface and that a liquid-tight layer is formed between the opposed surface and the substrate surface, and nitrogen gas is discharged toward an upstream-side interface of the liquid-tight layer from the upstream side (+X) to the proximity member in the moving direction. Thus discharged nitrogen gas is blown selectively and in concentration against an exposed interface portion, a rinsing liquid forming the exposed interface portion is blown away from the substrate surface and the liquid-tight layer, and a substrate surface region which corresponds to the exposed interface portion is dried.
|
