| 摘要 |
In a method for preparing a sample for electron microscopic examinations, in particular with a transmission electron microscope (TEM), a) a substrate containing the sample to be prepared on a sample locus is provided in a vacuum chamber, b) a protective layer is applied onto a surface of the sample locus, c) the sample located under the protective layer is separated from the substrate by an ion beam, the protective layer acting as a mask, and d) in the vacuum chamber, the separated sample is removed from the substrate.
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