Stress sensitive humidity sensor based on a MEMS structure

摘要

A humidity sensing apparatus and method include a substrate and a MEMS structure, wherein the MEMS structure is supported by the substrate. The MEMS structure comprises a humidity-sensitive material in association with a movable member such that when the humidity-sensitive material changes with humidity, the MEMS structure moves the movable member, thereby providing an indication of humidity based on a stress within the MEMS structure.