Method and system for sensing and identifying foreign particles in a gaseous environment

摘要

An optical method and system sense and identify a foreign particle in a gaseous environment. A light source generates light. An electrically-conductive sheet has an array of holes formed through the sheet. Each hole has a diameter that is less than one quarter of the light's wavelength. The sheet is positioned relative to the light source such that the light is incident on one face of the sheet. An optical detector is positioned adjacent the sheet's opposing face and is spaced apart therefrom such that a gaseous environment is adapted to be disposed therebetween. Alterations in the light pattern detected by the optical detector indicate the presence of a foreign particle in the holes or on the sheet, while a laser induced fluorescence (LIF) signature associated with the foreign particle indicates the identity of the foreign particle.