发明名称 |
DELTA-INFORMATION DESIGN CLOSURE IN INTEGRATED CIRCUIT FABRICATION |
摘要 |
Systems and methods for timing-driven shape closure in integrated circuit ("IC") fabrication are provided. These Integrated Design-Manufacturing Processes (" IDMP") include a delta flow that integrates information of the IC fabrication timing and geometry verification processes into the IC design. The delta flow is an incremental flow that includes delta-geometry timing prediction processes and/or delta-timing shape prediction processes for processing difference information associated with circuit characterization parameters. The delta flow independently re- characterizes an IC design using the difference or delta information corresponding to the circuit characterization parameters. The delta flow provides delta outputs (incremental) that enhance or re-characterize corresponding parameters of the devices and interconnect structures without the need to generate new circuit characterization parameters and without the need to re-process all information of the IC design.
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申请公布号 |
KR20080043870(A) |
申请公布日期 |
2008.05.19 |
申请号 |
KR20087008046 |
申请日期 |
2008.04.03 |
申请人 |
CLEAR SHAPE TECHNOLOGIES, INC. |
发明人 |
CHANG LI FUNG;WANG YAO TING;CHANG FANG CHENG |
分类号 |
H01L21/02;G06F17/50;H01L |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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