| 摘要 |
[PROBLEMS] To provide a semiconductor production apparatus capable of modifying an insulating film. [MEANS FOR SOLVING PROBLEMS] Irradiation unit is provided with irradiation means for irradiating an insulating film with a light of wavelength equal to or greater than that corresponding to the absorption edge of the insulating film, the wavelength not greater than that required for severing a bonding group associated with hydrogen of the insulating film.
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