Apparatus for carrying in/out substrate and method for carrying in/out substrate,申请号KR20077004439-传众专利搜索

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发明名称	Apparatus for carrying in/out substrate and method for carrying in/out substrate
摘要
申请公布号	KR100830225(B1)	申请公布日期	2008.05.16
申请号	KR20077004439	申请日期	2007.02.23
申请人		发明人
分类号	B65G49/06;H01L21/68	主分类号	B65G49/06
代理机构		代理人
主权项
地址

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