| 摘要 |
A lower electrode 4 and an auxiliary electrode 8 , a piezoelectric/electrostrictive film 5 , and an upper electrode 6 are sequentially arranged in layers on a substrate 1 . The lower electrode 4 is continuously formed in a region ranging from a first portion of the thick-walled portion 2 to a thin-walled diaphragm portion 3 . The auxiliary electrode 8 is continuously formed in a region ranging from a second portion of the thick-walled portion 2 opposite the first portion to a position on the thin-walled diaphragm portion 3 , the position being separated from the lower electrode 4 . The upper electrode 6 is formed in such a manner as to overlie the piezoelectric/electrostrictive film 5 and the auxiliary electrode 8 . Furthermore, a connection electrode 20 is provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8 . Thus, a plurality of paths are provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8 . Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode 6 caused by deterioration in insulating performance of the piezoelectric/electrostrictive film 5 , electrical connection between the upper electrode 6 and the auxiliary electrode 8 can be maintained through the remaining path(s).
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