| 摘要 |
An optical waveguide structure, a substrate structure therefor, and a method of manufacturing the optical waveguide structure are provided to suppress a thermal deformation of the waveguide structure by forming upper and lower silicon nitride films on both sides of a silicon substrate. An optical waveguide structure includes a substrate(11), an upper silicon nitride film(13a), a lower silicon nitride film(13b), a lower clad layer(15), a core layer(17), and an upper cladding layer(19). The upper silicon nitride film is made of a nitride silicon on the substrate. The lower silicon nitride film is made of the nitride silicon under the substrate. The lower clad layer is formed on the upper silicon nitride film. The core layer is formed on the lower clad layer. The upper cladding layer is formed on the lower clad layer to enclose the core layer.
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